AlN-AlN Layer Bonding and Its Thermal Characteristics

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AlN-AlN Layer Bonding and Its Thermal Characteristics

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ژورنال

عنوان ژورنال: ECS Journal of Solid State Science and Technology

سال: 2015

ISSN: 2162-8769,2162-8777

DOI: 10.1149/2.0121507jss